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ASML PAS 5500 350C二手翻新光刻機(jī)
專業(yè)翻新改造ASML光刻機(jī)，現(xiàn)貨供應(yīng)ASML PAS 5500 300/350C/750F/850C/8TFH-A/100D/275D/450F/400D/400B/1150C，ASML TWINSCAN AT 850B/AT 850C/AT 1150C/XT 860M/XT 1060K/XT 1460K/XT 1700Fi/XT 1250D/XT 1700Gi等各種型號(hào)光刻機(jī)，歡迎來電咨詢。
產(chǎn)品描述
The PAS 5500/350C is a Deep UV stepper for 0.15-µm applications and beyond.
The high productivity and low cost of ownership allow capacity extensions in existing DUV stepper fabs as well.
The PAS 5500/350C system provides a very cost-effective mix-and-match lithography solution when used in
conjunction with other ASML PAS 5500 i-line and DUV stepper
Key Features and Benefits
Variable 0.63-NA Deep UV Lens, Full Stepper Field
Production resolution down to 150 nm.
Continuously variable partial coherence and annular illumination
Fully automated imaging optimization for different process layers.
Beam delivery laser technology
Remote laser location to facilitate easy maintenance and safe operation.
Through-The-Lens (TTL) phase modulated alignment
For optimum overlay and matching simultaneous with industry-leading throughput.
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